Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure

James M. Ablett, Christopher J. Wilson, Nguyen Mai Phuong, Junichi Koike, Zsolt Tokei, George E. Sterbinsky, Joseph C. Woicik

Research output: Contribution to journalArticle

5 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy