TY - JOUR
T1 - Characterization of AlN single crystal fabricated by a novel growth technique, "pyrolytic transportation method"
AU - Hironaka, Keiichiro
AU - Nagashima, Toru
AU - Ikeda, Susumu
AU - Azuma, Masanobu
AU - Takada, Kazuya
AU - Fukuyama, Hiroyuki
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2010/9/1
Y1 - 2010/9/1
N2 - Aluminum nitride single crystal fabricated by a novel growth technique "pyrolytic transportation method", which is advantageous for industrial process because of using α-Al2O3 as a source material instead of aluminum nitride, was characterized. This growth technique shows high growth rate up to 1.6 mm/h. High crystalline quality was indicated by X-ray topogragh and X-ray rocking curve. Full width at half maximum of (0 0 0 2) and (1 0 -1 0) were excellent values of 90 and 148 arcsec, respectively. Homoepitaxial overgrowth by hydride vapor phase epitaxy was successfully conducted. No dislocation was observed at the interface between the substrate and overgrowth layer by transmission electron microscopy.
AB - Aluminum nitride single crystal fabricated by a novel growth technique "pyrolytic transportation method", which is advantageous for industrial process because of using α-Al2O3 as a source material instead of aluminum nitride, was characterized. This growth technique shows high growth rate up to 1.6 mm/h. High crystalline quality was indicated by X-ray topogragh and X-ray rocking curve. Full width at half maximum of (0 0 0 2) and (1 0 -1 0) were excellent values of 90 and 148 arcsec, respectively. Homoepitaxial overgrowth by hydride vapor phase epitaxy was successfully conducted. No dislocation was observed at the interface between the substrate and overgrowth layer by transmission electron microscopy.
KW - A1. Crystal morphology
KW - A1. X-ray topography
KW - A2. Growth from vapor
KW - A2. Seed crystals
KW - A3. Vapor phase epitaxy
KW - B1. Nitrides
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U2 - 10.1016/j.jcrysgro.2010.04.007
DO - 10.1016/j.jcrysgro.2010.04.007
M3 - Article
AN - SCOPUS:77955347389
VL - 312
SP - 2527
EP - 2529
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
IS - 18
ER -