Abstract
The performance of a Fresnel zone plate has been tested by observing the focusing property of higher-order diffraction. The Fresnel zone plate was fabricated by the electron-beam lithography technique. The zone material was made from 1 μm-thick tantalum and the outermost zone width was 0.25 μm. The third-order focused spot size measured by the knife-edge scan method was 0.1 μm full width at half-maximum at an X-ray energy of 8 keV, which is exactly equal to one-third of the first-order focal spot size.
Original language | English |
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Pages (from-to) | 115-118 |
Number of pages | 4 |
Journal | Journal of Synchrotron Radiation |
Volume | 9 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2002 May 1 |
Externally published | Yes |
Keywords
- Fresnel zone plates
- Higher-order diffraction
- X-ray microbeams
ASJC Scopus subject areas
- Radiation
- Nuclear and High Energy Physics
- Instrumentation