Characterization of a Fresnel zone plate using higher-order diffraction

Akihisa Takeuchi, Yoshio Suzuki, Hidekazu Takano

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

The performance of a Fresnel zone plate has been tested by observing the focusing property of higher-order diffraction. The Fresnel zone plate was fabricated by the electron-beam lithography technique. The zone material was made from 1 μm-thick tantalum and the outermost zone width was 0.25 μm. The third-order focused spot size measured by the knife-edge scan method was 0.1 μm full width at half-maximum at an X-ray energy of 8 keV, which is exactly equal to one-third of the first-order focal spot size.

Original languageEnglish
Pages (from-to)115-118
Number of pages4
JournalJournal of Synchrotron Radiation
Volume9
Issue number3
DOIs
Publication statusPublished - 2002 May 1
Externally publishedYes

Keywords

  • Fresnel zone plates
  • Higher-order diffraction
  • X-ray microbeams

ASJC Scopus subject areas

  • Radiation
  • Nuclear and High Energy Physics
  • Instrumentation

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