Characterization and fabrication of zinc oxide nanowire devices

W. C. Lin, Y. C. Lin, C. J. Shih, Y. L. Chu, M. Esashi, A. A. Seshia

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    In this paper, we demonstrate an approach for the local synthesis of ZnO nanowires (ZnO NWs) and the potential for such structures to be incorporated into device applications. Three network ZnO NW devices are fabricated on a chip by using a bottom-up synthesis approach. Microheaters (defined by standard semiconductor processing) are used to synthesize the ZnO NWs under a zinc nitrate (Zn(NO3)2·6H2O) and hexamethylenetetramine (HMTA, (CH2)6·N4) solution. By controlling synthesis parameters, varying densities of networked ZnO NWs are locally synthesized on the chip. The fabricated networked ZnO NW devices are then characterized using UV excitation and cyclic voltammetry (CV) experiments to measure their photoresponse and electrochemical properties. The experimental results show that the techniques and material systems presented here have the potential to address interesting device applications using fabrication methods that are fully compatible with standard semiconductor processing.

    Original languageEnglish
    Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
    Pages441-444
    Number of pages4
    DOIs
    Publication statusPublished - 2013
    EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
    Duration: 2013 Jan 202013 Jan 24

    Publication series

    NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    ISSN (Print)1084-6999

    Other

    OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
    Country/TerritoryTaiwan, Province of China
    CityTaipei
    Period13/1/2013/1/24

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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