Characteristics on PZT (Pb(ZrxTi1-x)O3) films for piezoelectric angular rate sensor

Sung Ho Lee, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in microsystem technology. In our research, thick sol-gel lead zirconate titanate (Pb(Zr1-xTi x)O3) films were fabricated and their characteristics were investigated for angular rate sensor applications. The thickness of the PZT films was 1.5 μm, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT films was 12.0 μC/cm2. The electromechanical constants of PZT thin film showed the value of susceptance (B) of 4800 μs at capacitance of 790 pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 μm in amplitude at the resonant frequency of 35.8 kHz was obtained by the driving voltage of 5Vp-p of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier. The oscillating output voltage showed the values of 0.76 and 0.87 V in outer/inner driving electrode at the driving voltage of 5 Vp-p by external actuation using a stacked piezoactuator.

Original languageEnglish
Pages (from-to)88-92
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 2004 Aug 20


  • Dry and wet etching method
  • PZT film angular rate sensor
  • Sol-gel process

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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