Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system

M. Kadota, T. Kasanami, M. Minakata

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Piezoelectric ZnO films on glass substrate were deposited by an RF mode ECR sputtering system. It was confirmed that in the ZnO films deposited by this system, a smooth sidewall structure of ZnO film without coarse columnar (fibre) grains was observed and that driving a 1.1 GHz fundamental mode of a Rayleigh SAW on ZnO/IDT/glass structure was possible at λ = 2.4 µm.

Original languageEnglish
Pages (from-to)2315-2317
Number of pages3
JournalElectronics Letters
Volume28
Issue number25
DOIs
Publication statusPublished - 1992 Dec

Keywords

  • Piezoelectric devices and materials
  • Surface acoustic wave devices
  • Thin films

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system'. Together they form a unique fingerprint.

Cite this