Piezoelectric ZnO films on glass substrate were deposited by an RF mode ECR sputtering system. It was confirmed that in the ZnO films deposited by this system, a smooth sidewall structure of ZnO film without coarse columnar (fibre) grains was observed and that driving a 1.1 GHz fundamental mode of a Rayleigh SAW on ZnO/IDT/glass structure was possible at λ = 2.4 µm.
- Piezoelectric devices and materials
- Surface acoustic wave devices
- Thin films
ASJC Scopus subject areas
- Electrical and Electronic Engineering