Characteristics of LIGA PMMA micromirror for MOEM optical switch application

Won Ick Jang, Moon Youn Jung, Chi Hoon Jun, Youn Tae Kim, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We investigated characteristic of LIGA PMMA (polymethylmethacrylate) micromirror for MOEM optical switch application. The optical switching device was designed and fabricated in multi-layered polysilicon using the LPCVD process. We performed adhesion test on silicon and silicon oxide and acid test by anhydrous HF GPE (gas-phase etching) and 6:1 BHF wet etch processes for thin and thick gold-coated PMMA micromirrors. Normalized reflectance and surface roughness are measured by UV Spectrometer and WYKO interferometer, respectively. We found that the reflectance of gold-coated PMMA micromirror on the silicon surface was above 90%.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1498-1501
Number of pages4
Volume2
ISBN (Print)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Micromirrors
  • Optical devices
  • Optical interferometry
  • Optical switches
  • Reflectivity
  • Rough surfaces
  • Silicon
  • Surface roughness
  • Testing
  • Wet etching

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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