Characteristics of buckled bridges and lifted micromirror using film stress

M. Sasaki; K. Hane; D. Briand; W. Noell; N. De Rooij

Characteristics of buckled bridges and lifted micromirror using film stress

M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages	82-83
Number of pages	2
Publication status	Published - 2006 Dec 1
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: 2006 Aug 21 → 2006 Aug 24

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

Other	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country	United States
City	Big Sky, MT
Period	06/8/21 → 06/8/24

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

Cite this

Characteristics of buckled bridges and lifted micromirror using film stress. / Sasaki, M.; Hane, K.; Briand, D.; Noell, W.; De Rooij, N.

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. p. 82-83 1708275 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sasaki, M, Hane, K, Briand, D, Noell, W & De Rooij, N 2006, Characteristics of buckled bridges and lifted micromirror using film stress. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708275, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, pp. 82-83, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 06/8/21.

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title = "Characteristics of buckled bridges and lifted micromirror using film stress",

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T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

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EP - 83

BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

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Y2 - 21 August 2006 through 24 August 2006

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