Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode

Yasuhiro Tanaka, Satoru Iizuka

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In order to achieve inner wall surface treatment of glass tube of micrometer and gas decomposition flowing through a small diameter glass tube, a micro-plasma is useful. We have developed a new method for producing a micro-plasma in order to apply to the surface treatment and micro-plasma CVD on the inner wall surface of a micro-glass tube at atmospheric pressure. The plasma is produced by using a coaxial micro-electrode to which RF impulse is applied. We have elucidated fundamental characteristics of the discharge and optimized the electrode configuration. We find that breakdown voltage can be decreased with a decrease in the diameter of the inner electrode. We also clarified the effect of gas species and flow rate on the discharge.

Original languageEnglish
Pages (from-to)436-439
Number of pages4
JournalThin Solid Films
Volume506-507
DOIs
Publication statusPublished - 2006 May 26

Keywords

  • Atmospheric pressure discharge
  • Micro-plasma
  • RF impulse discharge

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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