Abstract
In order to achieve inner wall surface treatment of glass tube of micrometer and gas decomposition flowing through a small diameter glass tube, a micro-plasma is useful. We have developed a new method for producing a micro-plasma in order to apply to the surface treatment and micro-plasma CVD on the inner wall surface of a micro-glass tube at atmospheric pressure. The plasma is produced by using a coaxial micro-electrode to which RF impulse is applied. We have elucidated fundamental characteristics of the discharge and optimized the electrode configuration. We find that breakdown voltage can be decreased with a decrease in the diameter of the inner electrode. We also clarified the effect of gas species and flow rate on the discharge.
| Original language | English |
|---|---|
| Pages (from-to) | 436-439 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 506-507 |
| DOIs | |
| Publication status | Published - 2006 May 26 |
Keywords
- Atmospheric pressure discharge
- Micro-plasma
- RF impulse discharge
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
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Cite this
Tanaka, Y., & Iizuka, S. (2006). Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode. Thin Solid Films, 506-507, 436-439. https://doi.org/10.1016/j.tsf.2005.08.034