Characteristics of a large diameter radio-frequency negative hydrogen ion source

Yuko Sasaki, Sho Takayama, Haruhisa Nakano, Atsushi Komuro, Kazunori Takahashi, Akira Ando

Research output: Contribution to journalArticle

Abstract

The characteristics of a 230-mm-diameter radio-frequency (rf) negative hydrogen ion source are investigated by the measurements of electron density and temperature. A hydrogen plasma is produced by an inductively coupled discharge operated with an rf frequency of 300 kHz and a power of a few tens of kW, where a fieldeffect- transistor-based inverter power supply is used as an rf generator. The ion source has a magnetic filter for reduction of the electron temperature near the plasma grid used for the extraction of a negative ion beam. A high electron density greater than 1018 m-3 is successfully obtained for an operating gas pressure of 0.3 Pa. The electron temperature near the plasma grid is observed to decrease to about 1 eV with increasing magnetic field strength of the magnetic filter.

Original languageEnglish
Article number2405088
JournalPlasma and Fusion Research
Volume11
Issue number1
DOIs
Publication statusPublished - 2016 Jan 1

Keywords

  • FET-based inverter rf power supply
  • Ion source
  • NBI
  • Negative hydrogen ion
  • RF ion source

ASJC Scopus subject areas

  • Condensed Matter Physics

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