Characteristics of a 40.68-MHz radio frequency boosted low power glow discharge lamp

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5 Citations (Scopus)

Abstract

In order to perform precise depth profiling of conducting solid sample, a DC glow discharge lamp is often operated under low power conditions. Since a DC glow discharge at low power conditions gives low excitation, an additional boosting method having no influence on the cathodic sputtering (sampling process) is needed to obtain an emission intensity enough for precise depth profiling. When the frequency of a radio frequency (RF) discharge increases, the DC bias voltage decreases, yielding less sputtering. At 40.68 MHz, almost no sputtering occurs. When a DC discharge and such a 40.68-MHz RF discharge are combined, sputtering and excitation can be controlled independently. It is found (by selecting only the RF-excited spectra using a modulation technique) that higher excitation and emission (at least for excited levels below 15 eV) occur due to the RF-power, compared to a pure DC discharge at low power conditions. Since emission signal from the DC glow discharge can be eliminated by using modulation technique, interpretation of spectral intensity-time relationship is simple, regardless of DC glow discharge conditions for cathodic sputtering. Such a characteristic is advantageous in a precise profiling.

Original languageEnglish
Pages (from-to)1783-1792
Number of pages10
JournalSpectrochimica Acta - Part B Atomic Spectroscopy
Volume54
Issue number13
DOIs
Publication statusPublished - 1999 Dec 13

Keywords

  • 40.68 MHz
  • Atomic emission spectrometry
  • Glow discharge
  • Radio frequency

ASJC Scopus subject areas

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Spectroscopy

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