A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering