Characteristics And Analysis Of A Thin Film Inductor With Closed Magnetic Circuit Structure

M. Yamaguchi, S. Arakawa, H. Ohzeki, Y. Hayashi, K. I. Arai

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)

Abstract

A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.

Original languageEnglish
Pages (from-to)3015-3017
Number of pages3
JournalIEEE Transactions on Magnetics
Volume28
Issue number5
DOIs
Publication statusPublished - 1992 Sep

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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