Cavity pressure control for critical damping of packaged micro mechanical devices

Kazuyuki Minami, Terumi Moriuchi, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

27 Citations (Scopus)

Fingerprint Dive into the research topics of 'Cavity pressure control for critical damping of packaged micro mechanical devices'. Together they form a unique fingerprint.

Engineering & Materials Science