Cavity pressure control for critical damping of packaged micro mechanical devices

Kazuyuki Minami; Terumi Moriuchi; Masayoshi Esashi

Cavity pressure control for critical damping of packaged micro mechanical devices

Kazuyuki Minami, Terumi Moriuchi, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to conference › Paper › peer-review

30 Citations (Scopus)

Abstract

Control of the cavity pressure of packaged micro mechanical devices is important to achieve wide frequency range by critical damping. We developed a novel method using non-evaporable getters (NEG) and inert gas to control the cavity pressure in anodically bonded glass-silicon structure. From the pressure control experiments using silicon diaphragms, it was confirmed that the cavity pressure could be controlled as designed, that is, 1 and 100Torr. In application to an accelerometer, cavity pressure was successfully controlled for wide frequency response.

Original language	English
Pages	240-243
Number of pages	4
Publication status	Published - 1995 Dec 1
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29

Other

Other	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	95/6/25 → 95/6/29

ASJC Scopus subject areas

Engineering(all)

Cite this

Cavity pressure control for critical damping of packaged micro mechanical devices. / Minami, Kazuyuki; Moriuchi, Terumi; Esashi, Masayoshi.

1995. 240-243 Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

Research output: Contribution to conference › Paper › peer-review

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AU - Moriuchi, Terumi

AU - Esashi, Masayoshi

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N2 - Control of the cavity pressure of packaged micro mechanical devices is important to achieve wide frequency range by critical damping. We developed a novel method using non-evaporable getters (NEG) and inert gas to control the cavity pressure in anodically bonded glass-silicon structure. From the pressure control experiments using silicon diaphragms, it was confirmed that the cavity pressure could be controlled as designed, that is, 1 and 100Torr. In application to an accelerometer, cavity pressure was successfully controlled for wide frequency response.

AB - Control of the cavity pressure of packaged micro mechanical devices is important to achieve wide frequency range by critical damping. We developed a novel method using non-evaporable getters (NEG) and inert gas to control the cavity pressure in anodically bonded glass-silicon structure. From the pressure control experiments using silicon diaphragms, it was confirmed that the cavity pressure could be controlled as designed, that is, 1 and 100Torr. In application to an accelerometer, cavity pressure was successfully controlled for wide frequency response.

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Cavity pressure control for critical damping of packaged micro mechanical devices

Abstract

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ASJC Scopus subject areas

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