Abstract
Control of the cavity pressure of packaged micro mechanical devices is important to achieve wide frequency range by critical damping. We developed a novel method using non-evaporable getters (NEG) and inert gas to control the cavity pressure in anodically bonded glass-silicon structure. From the pressure control experiments using silicon diaphragms, it was confirmed that the cavity pressure could be controlled as designed, that is, 1 and 100Torr. In application to an accelerometer, cavity pressure was successfully controlled for wide frequency response.
Original language | English |
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Pages | 240-243 |
Number of pages | 4 |
Publication status | Published - 1995 Dec 1 |
Event | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29 |
Other
Other | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) |
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City | Stockholm, Sweden |
Period | 95/6/25 → 95/6/29 |
ASJC Scopus subject areas
- Engineering(all)