Cavity pressure control for critical damping of packaged micro mechanical devices

Kazuyuki Minami, Terumi Moriuchi, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

27 Citations (Scopus)

Abstract

Control of the cavity pressure of packaged micro mechanical devices is important to achieve wide frequency range by critical damping. We developed a novel method using non-evaporable getters (NEG) and inert gas to control the cavity pressure in anodically bonded glass-silicon structure. From the pressure control experiments using silicon diaphragms, it was confirmed that the cavity pressure could be controlled as designed, that is, 1 and 100Torr. In application to an accelerometer, cavity pressure was successfully controlled for wide frequency response.

Original languageEnglish
Pages240-243
Number of pages4
Publication statusPublished - 1995 Dec 1
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: 1995 Jun 251995 Jun 29

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period95/6/2595/6/29

ASJC Scopus subject areas

  • Engineering(all)

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