Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation

Maiko Nishibori; Woosuck Shin; Kazuki Tajima; Lionel F. Houlet; Noriya Izu; Ichiro Matsubara; Norimitsu Murayama

doi:10.1143/JJAP.45.L1130

Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation

Maiko Nishibori, Woosuck Shin, Kazuki Tajima, Lionel F. Houlet, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si_0.8Ge_0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H₂ in air, 1000 ccm, at RT.

Original language	English
Pages (from-to)	L1130-L1132
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	45
Issue number	42-45
DOIs	https://doi.org/10.1143/JJAP.45.L1130
Publication status	Published - 2006 Nov 10
Externally published	Yes

Keywords

Catalyst combustor
Micro-power-generation
SIGe
Thermoelectric
Thermopile

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.45.L1130

Cite this

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abstract = "A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.",

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T1 - Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation

AU - Nishibori, Maiko

AU - Shin, Woosuck

AU - Tajima, Kazuki

AU - Houlet, Lionel F.

AU - Izu, Noriya

AU - Matsubara, Ichiro

AU - Murayama, Norimitsu

PY - 2006/11/10

Y1 - 2006/11/10

N2 - A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.

AB - A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.

KW - Catalyst combustor

KW - Micro-power-generation

KW - SIGe

KW - Thermoelectric

KW - Thermopile

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ER -

Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation

Abstract

Keywords

ASJC Scopus subject areas

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