Carbonization of Si Surface

Isao Kusunoki, Tsuyoshi Takaoka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)992-1000
Number of pages9
JournalShinku/Journal of the Vacuum Society of Japan
Volume41
Issue number12
DOIs
Publication statusPublished - 1998 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this