Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes

Keiji Ohara; Nozomu Suzuki; Satoru Iizuka

doi:10.1016/j.diamond.2010.02.025

Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes

Keiji Ohara, Nozomu Suzuki, Satoru Iizuka

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Carbon nanowires are formed on a surface of nanoparticles made of diamond-like carbon produced on a nickel plate placed in CH₄-Ar plasma. The dissociation of CH₄ is controlled by changing the mixing position of CH₄ along the Ar plasma produced in a small coaxial tube electrode. When CH₄ is introduced in low electron temperature T _e region, we observed an appearance of nanowires on the surface of microparticles. On the other hand, carbon nanowalls and/or nanoplatelets are formed when the CH₄ is mixed in the high T_e region.

Original language	English
Pages (from-to)	908-910
Number of pages	3
Journal	Diamond and Related Materials
Volume	19
Issue number	7-9
DOIs	https://doi.org/10.1016/j.diamond.2010.02.025
Publication status	Published - 2010 Jul 1

Keywords

Electron-energy control
Nanocrystalline diamond
Nanowall
Nanowire
Plasma CVD

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Materials Chemistry
Electrical and Electronic Engineering
Mechanical Engineering
Physics and Astronomy(all)
Chemistry(all)

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10.1016/j.diamond.2010.02.025

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title = "Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes",

abstract = "Carbon nanowires are formed on a surface of nanoparticles made of diamond-like carbon produced on a nickel plate placed in CH4-Ar plasma. The dissociation of CH4 is controlled by changing the mixing position of CH4 along the Ar plasma produced in a small coaxial tube electrode. When CH4 is introduced in low electron temperature T e region, we observed an appearance of nanowires on the surface of microparticles. On the other hand, carbon nanowalls and/or nanoplatelets are formed when the CH4 is mixed in the high Te region.",

keywords = "Electron-energy control, Nanocrystalline diamond, Nanowall, Nanowire, Plasma CVD",

author = "Keiji Ohara and Nozomu Suzuki and Satoru Iizuka",

year = "2010",

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doi = "10.1016/j.diamond.2010.02.025",

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TY - JOUR

T1 - Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes

AU - Ohara, Keiji

AU - Suzuki, Nozomu

AU - Iizuka, Satoru

PY - 2010/7/1

Y1 - 2010/7/1

N2 - Carbon nanowires are formed on a surface of nanoparticles made of diamond-like carbon produced on a nickel plate placed in CH4-Ar plasma. The dissociation of CH4 is controlled by changing the mixing position of CH4 along the Ar plasma produced in a small coaxial tube electrode. When CH4 is introduced in low electron temperature T e region, we observed an appearance of nanowires on the surface of microparticles. On the other hand, carbon nanowalls and/or nanoplatelets are formed when the CH4 is mixed in the high Te region.

AB - Carbon nanowires are formed on a surface of nanoparticles made of diamond-like carbon produced on a nickel plate placed in CH4-Ar plasma. The dissociation of CH4 is controlled by changing the mixing position of CH4 along the Ar plasma produced in a small coaxial tube electrode. When CH4 is introduced in low electron temperature T e region, we observed an appearance of nanowires on the surface of microparticles. On the other hand, carbon nanowalls and/or nanoplatelets are formed when the CH4 is mixed in the high Te region.

KW - Electron-energy control

KW - Nanocrystalline diamond

KW - Nanowall

KW - Nanowire

KW - Plasma CVD

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M3 - Article

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SN - 0925-9635

VL - 19

SP - 908

EP - 910

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 7-9

ER -

Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes

Abstract

Keywords

ASJC Scopus subject areas

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