Carbon nanowire formation in electron-energy controlled plasma produced by CH4/Ar rf discharges with small coaxial electrodes

Keiji Ohara, Nozomu Suzuki, Satoru Iizuka

Research output: Contribution to journalArticlepeer-review

Abstract

Carbon nanowires are formed on a surface of nanoparticles made of diamond-like carbon produced on a nickel plate placed in CH4-Ar plasma. The dissociation of CH4 is controlled by changing the mixing position of CH4 along the Ar plasma produced in a small coaxial tube electrode. When CH4 is introduced in low electron temperature T e region, we observed an appearance of nanowires on the surface of microparticles. On the other hand, carbon nanowalls and/or nanoplatelets are formed when the CH4 is mixed in the high Te region.

Original languageEnglish
Pages (from-to)908-910
Number of pages3
JournalDiamond and Related Materials
Volume19
Issue number7-9
DOIs
Publication statusPublished - 2010 Jul 1

Keywords

  • Electron-energy control
  • Nanocrystalline diamond
  • Nanowall
  • Nanowire
  • Plasma CVD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Chemistry(all)

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