Capacitive silicon resonators with piezoresistive heat engines

Nguyen Van Toan, Nguyen Van Nha, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This work reports on capacitive silicon resonators with piezoresistive heat engines. The resonant body is divided into many parts which are connected each other by small piezoresistive beams to enhance the electromechanical transduction using a piezo-resistive heat engine effect. The capacitive silicon resonators with single (device #1) and multiple (device #2) piezoresistive beams have been designed and fabricated. With bias current (7 V voltage source) passing through the resonant body, the insertion loss of the fabricated devices is increased by 10 dB and 20 dB for device #1 and device #2, respectively, in comparison with the capacitive silicon resonators without the power to the piezoresistive heat engine. In addition, the motional resistance of device #1 and #2 are reduced by 70% and 90%, respectively.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages456-459
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Van Toan, N., Van Nha, N., & Ono, T. (2017). Capacitive silicon resonators with piezoresistive heat engines. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 456-459). [7994085] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994085