Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere

Sang Jin Kim, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports a mass sensor using a very thin single crystalline silicon cantilever with capabilities of capacitive readout and electrostatic actuation. A capacitive electrode is formed at the opposite side of the cantilever. The sensing principle employs the frequency modulation of an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the LC oscillator. The vibration of the cantilever is detected by demodulation of the output signal of the LC oscillator. The displacement noise of the sensor is 0.05 nm/(Hz)0.5, which is equivalent to the capacitance change of 2.9×10-21 F. With a 67-μm-long and 250-nm-thick cantilever, the detectable minimum mass of 1×10-14 g is achieved using this capacitive detection method in atmosphere.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages256-260
Number of pages5
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • FM detection
  • Gas damping
  • Mass sensor
  • Temperature fluctuation noise
  • Thermomechanical noise

ASJC Scopus subject areas

  • Engineering(all)

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