Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere

Sang Jin Kim; Takahito Ono; Masayoshi Esashi

doi:10.1016/j.colsurfb.2005.05.006

Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere

Sang Jin Kim, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper reports a mass sensor using a very thin single crystalline silicon cantilever with capabilities of capacitive readout and electrostatic actuation. A capacitive electrode is formed at the opposite side of the cantilever. The sensing principle employs the frequency modulation of an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the LC oscillator. The vibration of the cantilever is detected by demodulation of the output signal of the LC oscillator. The displacement noise of the sensor is 0.05 nm/(Hz)^0.5, which is equivalent to the capacitance change of 2.9×10^-21 F. With a 67-μm-long and 250-nm-thick cantilever, the detectable minimum mass of 1×10^-14 g is achieved using this capacitive detection method in atmosphere.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	256-260
Number of pages	5
DOIs	https://doi.org/10.1016/j.colsurfb.2005.05.006
Publication status	Published - 2005 Nov 9
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	1

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

FM detection
Gas damping
Mass sensor
Temperature fluctuation noise
Thermomechanical noise

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1016/j.colsurfb.2005.05.006

Fingerprint Dive into the research topics of 'Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere'. Together they form a unique fingerprint.

Cite this

Kim, S. J., Ono, T., & Esashi, M. (2005). Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 256-260). [2B1.4] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1016/j.colsurfb.2005.05.006

Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere. / Kim, Sang Jin; Ono, Takahito; Esashi, Masayoshi.

TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 256-260 2B1.4 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kim, SJ, Ono, T & Esashi, M 2005, Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 2B1.4, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 1, pp. 256-260, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1016/j.colsurfb.2005.05.006

Kim SJ, Ono T, Esashi M. Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 256-260. 2B1.4. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). https://doi.org/10.1016/j.colsurfb.2005.05.006

Kim, Sang Jin ; Ono, Takahito ; Esashi, Masayoshi. / Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 256-260 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

@inproceedings{3a01f0d5ca3241228a7a9e3fde217fcd,

title = "Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere",

abstract = "This paper reports a mass sensor using a very thin single crystalline silicon cantilever with capabilities of capacitive readout and electrostatic actuation. A capacitive electrode is formed at the opposite side of the cantilever. The sensing principle employs the frequency modulation of an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the LC oscillator. The vibration of the cantilever is detected by demodulation of the output signal of the LC oscillator. The displacement noise of the sensor is 0.05 nm/(Hz)0.5, which is equivalent to the capacitance change of 2.9×10-21 F. With a 67-μm-long and 250-nm-thick cantilever, the detectable minimum mass of 1×10-14 g is achieved using this capacitive detection method in atmosphere.",

keywords = "FM detection, Gas damping, Mass sensor, Temperature fluctuation noise, Thermomechanical noise",

author = "Kim, {Sang Jin} and Takahito Ono and Masayoshi Esashi",

year = "2005",

month = nov,

day = "9",

doi = "10.1016/j.colsurfb.2005.05.006",

language = "English",

isbn = "0780389948",

series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",

pages = "256--260",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

TY - GEN

T1 - Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere

AU - Kim, Sang Jin

AU - Ono, Takahito

AU - Esashi, Masayoshi

PY - 2005/11/9

Y1 - 2005/11/9

N2 - This paper reports a mass sensor using a very thin single crystalline silicon cantilever with capabilities of capacitive readout and electrostatic actuation. A capacitive electrode is formed at the opposite side of the cantilever. The sensing principle employs the frequency modulation of an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the LC oscillator. The vibration of the cantilever is detected by demodulation of the output signal of the LC oscillator. The displacement noise of the sensor is 0.05 nm/(Hz)0.5, which is equivalent to the capacitance change of 2.9×10-21 F. With a 67-μm-long and 250-nm-thick cantilever, the detectable minimum mass of 1×10-14 g is achieved using this capacitive detection method in atmosphere.

AB - This paper reports a mass sensor using a very thin single crystalline silicon cantilever with capabilities of capacitive readout and electrostatic actuation. A capacitive electrode is formed at the opposite side of the cantilever. The sensing principle employs the frequency modulation of an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the LC oscillator. The vibration of the cantilever is detected by demodulation of the output signal of the LC oscillator. The displacement noise of the sensor is 0.05 nm/(Hz)0.5, which is equivalent to the capacitance change of 2.9×10-21 F. With a 67-μm-long and 250-nm-thick cantilever, the detectable minimum mass of 1×10-14 g is achieved using this capacitive detection method in atmosphere.

KW - FM detection

KW - Gas damping

KW - Mass sensor

KW - Temperature fluctuation noise

KW - Thermomechanical noise

UR - http://www.scopus.com/inward/record.url?scp=27544479055&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=27544479055&partnerID=8YFLogxK

U2 - 10.1016/j.colsurfb.2005.05.006

DO - 10.1016/j.colsurfb.2005.05.006

M3 - Conference contribution

AN - SCOPUS:27544479055

SN - 0780389948

SN - 9780780389946

T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

SP - 256

EP - 260

BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Capacitive resonant mass sensor with LC resonant circuit for use in atmosphere

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this