Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit

Sang Jin Kim, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

In this letter, capacitive mass sensing with a 250-nm-thick single-crystalline silicon cantilever is investigated. The mass sensor employs the frequency modulation detection method using an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the oscillator. The displacement noise of the demonstrated capacitive detection is 0.05 nm (Hz)0.5, which is equivalent to the capacitance change of 2.4× 10-21 F. It is experimentally shown that the capacitive detection is less affected to temperature fluctuation noise than optical detection. The detectable minimum mass of 1× 10-14 g is achieved using capacitive detection in ambient atmosphere.

Original languageEnglish
Article number053116
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume88
Issue number5
DOIs
Publication statusPublished - 2006 Feb 10

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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