Capability of LiTaO3/Quartz HAL SAW Resonators Confirmed by Simulation and Measurement

Michio Kadota, Yoshimi Ishii, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper reports hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a thin LiTaO3 (LT) plate with negative TCF and a quartz substrate with positive TCF. In the previous study, a high impedance (Z) ratio (82 dB), an excellent temperature coefficient of frequency (TCF: 2 ppm/°C), and spurious-free characteristic up to 14 GHz were demonstrated. In this study, two kinds of LT/ quartz HAL SAW resonators with different wavelengths of interdigital transducer (IDT) were fabricated, and measured results were compared with simulated ones. The measured bandwidths (BWs) roughly agreed with the simulated ones. Although many measured values of Z ratios are lower than the simulated ones, the best Z ratios among them are similar to the simulated ones. This result is reasonable taking account of the imperfectness of laboratory-level fabrication, and suggests that the simulation in this study well predicts the performance of real devices.

Original languageEnglish
Title of host publicationIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683057
DOIs
Publication statusPublished - 2019 Apr
Event2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019 - Orlando, United States
Duration: 2019 Apr 142019 Apr 18

Publication series

NameIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings

Conference

Conference2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019
CountryUnited States
CityOrlando
Period19/4/1419/4/18

Keywords

  • LT thickness
  • LiTaO3
  • SAW resonator
  • hetero acoustic layer
  • impedance ratio
  • quartz
  • simulation

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications
  • Instrumentation

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