Cantilever with integrated resonator for application of scanning probe microscope

D. W. Lee, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review

28 Citations (Scopus)


A silicon cantilever with a small torsional resonator is designed by finite element method (FEM) and fabricated by silicon micromachining technology. The mechanical elements of the probe consist of the cantilever beam for actuation and the small torsional resonator for force detection. The torsional resonator with small mass (width of 8 μm×length of 21 μm) is integrated at the end of the cantilever beam (width of 36 μm×length of 150 μm) and the resonator is suspended by thin two beams (width of 1 μm×length of 2.5 μm). High resonance frequency can be achieved by reduction of the resonator size and the smaller resonator with high resonance frequency is insensitive to thermo-mechanical noise that is inversely proportional to the resonance frequency. By flowing a current to the small metal lines on the resonator, the torsional resonator is vibrated. A force interaction between the tip and the sample is directly measured by the induced electromotive force. The high resonance of the cantilever beam is favorable for obtaining a high scanning speed in SPM operation instead of conventional piezo-tube scanner. In the vertical direction, the fabricated cantilever beams has a static deflection of 1 μm when flowing a dc current of 40 mA to the wire on the cantilever beam and applying magnetic field of 2000 G. The oscillation amplitude of the resonator is 28 nm when an ac current of 4 mA is applied to the wire on the resonator. The resonance frequency of the torsional resonator as measured in air was 3.4 MHz, with a quality factor of 203. The fabricated resonator has a thermal noise vibration amplitude of 6.3×10-15 m. At room temperature, the minimum detectable force of the resonator can reach 6.75×10-14 N.

Original languageEnglish
Pages (from-to)11-16
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 2000 May 22
EventThe 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn
Duration: 1999 Jun 71999 Jun 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


Dive into the research topics of 'Cantilever with integrated resonator for application of scanning probe microscope'. Together they form a unique fingerprint.

Cite this