Cantilever-type FePd/PZT stacked-layer magnetic sensors with high sensitivity

Takashi Saito, Mio Hamashima, Chihiro Saito, Motoichi Nakamura, Teiko Okazaki, Yasubumi Furuya, Hideo Muro

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

FePd/PZT/FePd and FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause longitudinal stress magnetostrictively, producing a piezoelectric output voltage in the PZT layer. The prototype sensors were 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer were 10 and 330 μm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably well with the calculated ones.

Original languageEnglish
Pages (from-to)8-15
Number of pages8
JournalElectronics and Communications in Japan
Volume96
Issue number11
DOIs
Publication statusPublished - 2013 Nov 1
Externally publishedYes

Keywords

  • magnetic sensor
  • magnetostrictive
  • piezoelectric
  • stacked layer

ASJC Scopus subject areas

  • Signal Processing
  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Applied Mathematics

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