Cantilever probe integrated with light-emitting diode, waveguide, aperture, and photodiode for scanning near-field optical microscope

Minoru Sasaki, Kotaro Tanaka, Kazuhiro Hane

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A microfabricated scanning near-field optical microscope (SNOM) probe integrated with a light-emitting diode, waveguide, aperture, and photodiode is described. This probe includes all optical elements necessary for SNOM on the Si cantilever. By using a-Si as the core layer and SiO2 as the cladding layer, the process for fabricating the waveguide is compatible with that for fabricating the photodiode. The light is confirmed to transmit along the waveguide route with the large curvature. The obtained SNOM image shows a spatial resolution better than 200 nm.

Original languageEnglish
Pages (from-to)7150-7153
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number12 B
DOIs
Publication statusPublished - 2000 Dec

Keywords

  • Aperture
  • Integration
  • Light-emitting diode
  • Photodiode
  • Scanning near-field optical microscope
  • Waveguide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Cantilever probe integrated with light-emitting diode, waveguide, aperture, and photodiode for scanning near-field optical microscope'. Together they form a unique fingerprint.

  • Cite this