Buried interfaces in Mo/Si multilayers studied by soft-X-ray emission spectroscopy

Noboni Miyata, Sadayuki Ishikawa, Mihiro Yanagihara, Makoto Watanabe

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

We measured the Si L23 soft-X-ray emission spectra for Mo/Si multilayers using monochromatized synchrotron radiation near the Si L23 absorption threshold. On the basis of the spectral analysis, it was determined that the interfaces of Mo/Si multilayers consist of Mo3Si interlayers of 0.8±0.1 nm in thickness. This study confirmed that soft-X-ray emission spectroscopy is a useful method of studying buried layers and interfaces nondestructively.

Original languageEnglish
Pages (from-to)6476-6478
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number11
DOIs
Publication statusPublished - 1999 Nov

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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