We measured the Si L23 soft-X-ray emission spectra for Mo/Si multilayers using monochromatized synchrotron radiation near the Si L23 absorption threshold. On the basis of the spectral analysis, it was determined that the interfaces of Mo/Si multilayers consist of Mo3Si interlayers of 0.8±0.1 nm in thickness. This study confirmed that soft-X-ray emission spectroscopy is a useful method of studying buried layers and interfaces nondestructively.
|Number of pages||3|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Publication status||Published - 1999 Nov|
ASJC Scopus subject areas
- Physics and Astronomy(all)