A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.
- Excimer laser
- Fiber bundle
- Hollow fiber
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics