Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

Ozgur Yilmaz, Yuji Matsuura, Mitsunobu Miyagi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.

Original languageEnglish
Article number106501
JournalOptical Engineering
Volume44
Issue number10
DOIs
Publication statusPublished - 2005 Oct 1

Keywords

  • Excimer laser
  • Fiber bundle
  • Hollow fiber

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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