Bulk micromachining for sensors and actuators

Masayoshi Esashi

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

Deep reactive ion etching (RIE) was developed not only for silicon but also other materials and silicon microstructures made by the deep RIE was used as molds for making ceramic microstructures. Key elements of systems such as microactuators to generate a large force and microprobes for future data storage device were described. Packaged micromechanical sensors as pressure sensors and electrostatically levitating micromotors for gyroscopes were developed. Active catheters which move like snakes in blood vessels and sensors for the catheter were studied for the purpose of minimal invasive medicine. Basic problems like Q of resonators and the electrical discharge of electrostatic microactuators were the topics of the research.

Original languageEnglish
Pages (from-to)6-15
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4180
DOIs
Publication statusPublished - 2000 Dec 1
EventMEMS Reliability for Critical Applications - Santa Clara, CA, USA
Duration: 2000 Sep 202000 Sep 20

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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