Abstract
A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.
Original language | English |
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Title of host publication | TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers |
Pages | 1380-1383 |
Number of pages | 4 |
Volume | 2 |
DOIs | |
Publication status | Published - 2005 Nov 9 |
Externally published | Yes |
Event | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9 |
Other
Other | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
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Country/Territory | Korea, Republic of |
City | Seoul |
Period | 05/6/5 → 05/6/9 |
Keywords
- Actuator
- Deep etching
- Lithium niobate (LiNbO )
- Piezoelectric
- Sensor
ASJC Scopus subject areas
- Engineering(all)