Bulk-micromachined lithium niobate sensor and actuator for harsh environments

Andrew Randles; Shuji Tanaka; Brett Pokines; Masayoshi Esashi

doi:10.1109/SENSOR.2005.1497338

Bulk-micromachined lithium niobate sensor and actuator for harsh environments

Andrew Randles, Shuji Tanaka, Brett Pokines, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 ^-4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1380-1383
Number of pages	4
Volume	2
DOIs	https://doi.org/10.1109/SENSOR.2005.1497338
Publication status	Published - 2005 Nov 9
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

Actuator
Deep etching
Lithium niobate (LiNbO )
Piezoelectric
Sensor

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/SENSOR.2005.1497338

Fingerprint Dive into the research topics of 'Bulk-micromachined lithium niobate sensor and actuator for harsh environments'. Together they form a unique fingerprint.

Cite this

Bulk-micromachined lithium niobate sensor and actuator for harsh environments. / Randles, Andrew; Tanaka, Shuji; Pokines, Brett; Esashi, Masayoshi.

TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. Vol. 2 2005. p. 1380-1383 3E4.21.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Randles, A, Tanaka, S, Pokines, B & Esashi, M 2005, Bulk-micromachined lithium niobate sensor and actuator for harsh environments. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. vol. 2, 3E4.21, pp. 1380-1383, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497338

@inproceedings{7428cc05d28d4d5e9422193e5f0a2d71,

title = "Bulk-micromachined lithium niobate sensor and actuator for harsh environments",

abstract = "A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.",

keywords = "Actuator, Deep etching, Lithium niobate (LiNbO ), Piezoelectric, Sensor",

author = "Andrew Randles and Shuji Tanaka and Brett Pokines and Masayoshi Esashi",

year = "2005",

month = nov,

day = "9",

doi = "10.1109/SENSOR.2005.1497338",

language = "English",

isbn = "0780389948",

volume = "2",

pages = "1380--1383",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

TY - GEN

T1 - Bulk-micromachined lithium niobate sensor and actuator for harsh environments

AU - Randles, Andrew

AU - Tanaka, Shuji

AU - Pokines, Brett

AU - Esashi, Masayoshi

PY - 2005/11/9

Y1 - 2005/11/9

N2 - A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

AB - A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

KW - Actuator

KW - Deep etching

KW - Lithium niobate (LiNbO )

KW - Piezoelectric

KW - Sensor

UR - http://www.scopus.com/inward/record.url?scp=27544499739&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=27544499739&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2005.1497338

DO - 10.1109/SENSOR.2005.1497338

M3 - Conference contribution

AN - SCOPUS:27544499739

SN - 0780389948

SN - 9780780389946

VL - 2

SP - 1380

EP - 1383

BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -