Bulk-micromachined lithium niobate sensor and actuator for harsh environments

Andrew Randles, Shuji Tanaka, Brett Pokines, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1380-1383
Number of pages4
Volume2
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Actuator
  • Deep etching
  • Lithium niobate (LiNbO )
  • Piezoelectric
  • Sensor

ASJC Scopus subject areas

  • Engineering(all)

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