Bulk-micromachined lithium niobate sensor and actuator for harsh environments

Andrew Randles; Shuji Tanaka; Brett Pokines; Masayoshi Esashi

doi:10.1109/SENSOR.2005.1497338

Bulk-micromachined lithium niobate sensor and actuator for harsh environments

Andrew Randles, Shuji Tanaka, Brett Pokines, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 ^-4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1380-1383
Number of pages	4
Volume	2
DOIs	https://doi.org/10.1109/SENSOR.2005.1497338
Publication status	Published - 2005 Nov 9
Externally published	Yes
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

Actuator
Deep etching
Lithium niobate (LiNbO )
Piezoelectric
Sensor

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/SENSOR.2005.1497338

Cite this

Bulk-micromachined lithium niobate sensor and actuator for harsh environments. / Randles, Andrew; Tanaka, Shuji; Pokines, Brett; Esashi, Masayoshi.

TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. Vol. 2 2005. p. 1380-1383 3E4.21.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Randles, A, Tanaka, S, Pokines, B & Esashi, M 2005, Bulk-micromachined lithium niobate sensor and actuator for harsh environments. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. vol. 2, 3E4.21, pp. 1380-1383, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497338

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N2 - A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

AB - A lithium niobate actuator has been successfully fabricated using bulk-miromachining with a metal mask. The method reported here uses a chrome/gold mask and then etching on the lithium niobate is carried out in hydrofluoric acid at 80 °C. This results in an etch rate of 50 μm/h and an undercut of the 5.5 μm/h. The fabricated actuator used the deep trenches etched into the lithium niobate, and nickel electrodes were electroplated into these trenches. The actuator was tested but the deflection was as small as 4.9 × 10 -4 μm/V. This is because lithium niobate was not properly re-poled, so that piezoelectric deformation in the lithium niobate canceled out.

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KW - Lithium niobate (LiNbO )

KW - Piezoelectric

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Bulk-micromachined lithium niobate sensor and actuator for harsh environments

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