Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film

Le Van Minh, Motoaki Hara, Fumimasa Horikiri, Kenji Shibata, Tomoyoshi Mishima, Hiroki Kuwano

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

Abstract

In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO3 (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O 3 (PZT). In a micromachined energy harvester, a 2 μm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g-2 mm-3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s-2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters.

Original languageEnglish
Article number035029
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number3
DOIs
Publication statusPublished - 2013 Mar 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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