Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film

Le Van Minh; Motoaki Hara; Fumimasa Horikiri; Kenji Shibata; Tomoyoshi Mishima; Hiroki Kuwano

doi:10.1088/0960-1317/23/3/035029

Bulk micromachined energy harvesters employing (K, Na)NbO₃ thin film

Le Van Minh, Motoaki Hara, Fumimasa Horikiri, Kenji Shibata, Tomoyoshi Mishima, Hiroki Kuwano

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO₃ (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O ₃ (PZT). In a micromachined energy harvester, a 2 μm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g^-2 mm^-3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s^-2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters.

Original language	English
Article number	035029
Journal	Journal of Micromechanics and Microengineering
Volume	23
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/23/3/035029
Publication status	Published - 2013 Mar 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/23/3/035029

Cite this

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abstract = "In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO3 (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O 3 (PZT). In a micromachined energy harvester, a 2 μm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g-2 mm-3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s-2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters.",

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T1 - Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film

AU - Minh, Le Van

AU - Hara, Motoaki

AU - Horikiri, Fumimasa

AU - Shibata, Kenji

AU - Mishima, Tomoyoshi

AU - Kuwano, Hiroki

PY - 2013/3/1

Y1 - 2013/3/1

N2 - In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO3 (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O 3 (PZT). In a micromachined energy harvester, a 2 μm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g-2 mm-3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s-2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters.

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Bulk micromachined energy harvesters employing (K, Na)NbO₃ thin film

Abstract

ASJC Scopus subject areas

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