Piezoelectricity of lead zirconate titanate (PZT) thin films has been successfully obtained. The films were fabricated by reactive sputtering of a composite metal target. They were found to possess good ferroelectric and dielectric properties. Two poling configurations were used. Bulk and surface acoustic wave measurements using poled PZT films are presented. Scanning acoustic microscope images and V(z) curves obtained at 775 MHz were used to characterize these thin films.
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