Bulk and surface acoustic wave transduction in sputtered lead zirconate titanate thin films

K. Sreenivas, M. Sayer, C. K. Jen, K. Yamanaka

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Piezoelectricity of lead zirconate titanate (PZT) thin films has been successfully obtained. The films were fabricated by reactive sputtering of a composite metal target. They were found to possess good ferroelectric and dielectric properties. Two poling configurations were used. Bulk and surface acoustic wave measurements using poled PZT films are presented. Scanning acoustic microscope images and V(z) curves obtained at 775 MHz were used to characterize these thin films.

Original languageEnglish
Pages (from-to)291-295
Number of pages5
JournalUltrasonics Symposium Proceedings
Volume1
Publication statusPublished - 1988 Oct 1
EventIEEE 1988 Ultrasonics Symposium - Proceedings - Chicago, IL, USA
Duration: 1988 Oct 21988 Oct 5

ASJC Scopus subject areas

  • Engineering(all)

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