Buckled bridges using film stress for three-dimensional structures: Effects of lateral designs on vertical profiles and dynamic characteristics

Minoru Sasaki, Kazuhiro Hane, Danick Briand, Wilfried Noell, Nicolaas F. de Rooij

Research output: Contribution to journalArticlepeer-review

Abstract

Bridges buckled by film stress can generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.

Original languageEnglish
Pages (from-to)131-136
Number of pages6
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume5
Issue number2
DOIs
Publication statusPublished - 2010 Mar

Keywords

  • Buckled bridge
  • Film stress
  • Radius of curvature
  • SOI-MEMS
  • Three-dimensional structure

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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