Buckled bridges using film stress for three-dimensional structures: Effects of lateral designs on vertical profiles and dynamic characteristics

Minoru Sasaki; Kazuhiro Hane; Danick Briand; Wilfried Noell; Nicolaas F. de Rooij

doi:10.1002/tee.20507

Buckled bridges using film stress for three-dimensional structures: Effects of lateral designs on vertical profiles and dynamic characteristics

Minoru Sasaki, Kazuhiro Hane, Danick Briand, Wilfried Noell, Nicolaas F. de Rooij

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

Abstract

Bridges buckled by film stress can generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.

Original language	English
Pages (from-to)	131-136
Number of pages	6
Journal	IEEJ Transactions on Electrical and Electronic Engineering
Volume	5
Issue number	2
DOIs	https://doi.org/10.1002/tee.20507
Publication status	Published - 2010 Mar

Keywords

Buckled bridge
Film stress
Radius of curvature
SOI-MEMS
Three-dimensional structure

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1002/tee.20507

Cite this

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abstract = "Bridges buckled by film stress can generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.",

keywords = "Buckled bridge, Film stress, Radius of curvature, SOI-MEMS, Three-dimensional structure",

author = "Minoru Sasaki and Kazuhiro Hane and Danick Briand and Wilfried Noell and {de Rooij}, {Nicolaas F.}",

year = "2010",

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AU - Sasaki, Minoru

AU - Hane, Kazuhiro

AU - Briand, Danick

AU - Noell, Wilfried

AU - de Rooij, Nicolaas F.

PY - 2010/3

Y1 - 2010/3

N2 - Bridges buckled by film stress can generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.

AB - Bridges buckled by film stress can generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.

KW - Buckled bridge

KW - Film stress

KW - Radius of curvature

KW - SOI-MEMS

KW - Three-dimensional structure

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JF - IEEJ Transactions on Electrical and Electronic Engineering

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Buckled bridges using film stress for three-dimensional structures: Effects of lateral designs on vertical profiles and dynamic characteristics

Abstract

Keywords

ASJC Scopus subject areas

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