Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique

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29 Citations (Scopus)

Abstract

We fabricated a two-dimensional subwavelength grating (SWG) on a polymethyl methacrylate (PMMA) film using a molding technique. A method of fabricating SWGs with high accuracy using a replica technique in an atmospheric environment was proposed. The SWG consisted of tapered gratings with a 200 nm period and a 200 nm deep groove. The reflectivity at wavelengths from 400 nm to 800 nm was measured and compared with the results calculated on the basis of rigorous coupled-wave analysis. At these wavelengths, the reflectivity decreased to approximately half that of the PMMA film.

Original languageEnglish
Pages (from-to)183-185
Number of pages3
JournalOptical Review
Volume9
Issue number5
DOIs
Publication statusPublished - 2002 Jan 1

Keywords

  • Antireflection
  • Micromachining
  • Mold
  • Polymethyl methacrylate
  • Rigorous coupled-wave analysis
  • Subwavelength grating

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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