Boron-doped diamond scanning probe for thermo-mechanical nanolithography

J. H. Bae, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

The good thermal conductivity, wear resistance and chemical inertness of a probe material are the essential terms for the processing speed and durability in the probe-based thermo-mechanical lithography. Considering these criteria, diamond can be regarded as the ideal material for a probe. This paper describes the microfabrication, evaluation and application of a boron-doped diamond micro-probe with an integrated resistive heater element. The diamond heater with a pyramidal tip, which is formed at the end of two diamond beams, can be electrically heated by flowing a DC or AC current. The high thermal conductivity of the diamond base supporting the heater element allows a very quick thermal response of 0.45 μs. A hard-wearing sharp diamond tip formed by silicon-lost mold technique shows an excellent durability in contact operation with a sample. Demonstration of thermo-mechanical nanolithography with this heated probe exhibits line patterns with the feature size of 40 nm on a Polymethylmethacrylate (PMMA) film and transferred pits-pattern with the diameter of 230 nm and the pitch of 400 nm onto the silicon substrate.

Original languageEnglish
Pages (from-to)2128-2135
Number of pages8
JournalDiamond and Related Materials
Volume12
Issue number12
DOIs
Publication statusPublished - 2003 Jan 1

Keywords

  • Boron-doped diamond
  • Nanolithography
  • Polymethylmethacrylate

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

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