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Blocking of deuterium diffusion in poly-Si/Al2O3/HfxSi1-xO2/SiO2 high- k stacks as evidenced by atom probe tomography
Y. Tu, B. Han, Yasuo Shimizu, Y. Kunimune, Y. Shimada, T. Katayama, T. Ide, M. Inoue, F. Yano, K. Inoue, Y. Nagai
Research output: Contribution to journal › Article › peer-review
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(Scopus)