TY - GEN
T1 - Bimorph-type magnetostrictive actuator/sensor thin films
AU - Okazaki, Teiko
AU - Okanisi, Norimasa
AU - Miura, Yuki
AU - Michigami, Munemi
AU - Furuya, Yasubumi
AU - Takeuchi, Ichiro
AU - Wuttig, Manfred
PY - 2006
Y1 - 2006
N2 - Giant magnetostrictive Fe-Pd and Fe-Ga thin films are expected as actuator/sensor materials with high respective velocity and huge stress created by the magnetostriction. In order to develop magnetostrictive material induced by low magnetic field, we investigated bimorph-type magnetostrictive (positive magnetostriction / substrate / negative magnetostriction) thin films, that is, Fe-Pd(1, 3μm) or Fe-Ga(1, 3μm)/substlate /Ni(1, 3μm) by magnetron sputtering system. The substrate is Al(50μm) or kapton foil (125μm). Displacement of a upper part of these films was measured using an optical lever method. The displacement of the Fe70-Pd.io(3μm)/Al(50μm)/Ni(3μm)film (length is 20 mm) was 280 μm under low DC magnetic field of 500 Oe and exhibits little hysteresis. These magnetostrictive properties are maintained under low alternating magnetic field. Moreover, the displacement of the film at the resonance frequency exhibits a peak and reached to 1.4 mm. The bimorph-type magnetostrictive thin film is useful for application in micro device as micro-pomp.
AB - Giant magnetostrictive Fe-Pd and Fe-Ga thin films are expected as actuator/sensor materials with high respective velocity and huge stress created by the magnetostriction. In order to develop magnetostrictive material induced by low magnetic field, we investigated bimorph-type magnetostrictive (positive magnetostriction / substrate / negative magnetostriction) thin films, that is, Fe-Pd(1, 3μm) or Fe-Ga(1, 3μm)/substlate /Ni(1, 3μm) by magnetron sputtering system. The substrate is Al(50μm) or kapton foil (125μm). Displacement of a upper part of these films was measured using an optical lever method. The displacement of the Fe70-Pd.io(3μm)/Al(50μm)/Ni(3μm)film (length is 20 mm) was 280 μm under low DC magnetic field of 500 Oe and exhibits little hysteresis. These magnetostrictive properties are maintained under low alternating magnetic field. Moreover, the displacement of the film at the resonance frequency exhibits a peak and reached to 1.4 mm. The bimorph-type magnetostrictive thin film is useful for application in micro device as micro-pomp.
UR - http://www.scopus.com/inward/record.url?scp=33646169983&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33646169983&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33646169983
SN - 155899842X
SN - 9781558998421
T3 - Materials Research Society Symposium Proceedings
SP - 87
EP - 92
BT - Materials Research Society Symposium Proceedings
T2 - 2005 Materials Research Society Fall Meeting
Y2 - 28 November 2005 through 1 December 2005
ER -