Bimorph-type magnetostrictive actuator/sensor thin films

Teiko Okazaki, Norimasa Okanisi, Yuki Miura, Munemi Michigami, Yasubumi Furuya, Ichiro Takeuchi, Manfred Wuttig

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


Giant magnetostrictive Fe-Pd and Fe-Ga thin films are expected as actuator/sensor materials with high respective velocity and huge stress created by the magnetostriction. In order to develop magnetostrictive material induced by low magnetic field, we investigated bimorph-type magnetostrictive (positive magnetostriction / substrate / negative magnetostriction) thin films, that is, Fe-Pd(1, 3μm) or Fe-Ga(1, 3μm)/substlate /Ni(1, 3μm) by magnetron sputtering system. The substrate is Al(50μm) or kapton foil (125μm). Displacement of a upper part of these films was measured using an optical lever method. The displacement of theμm)/Al(50μm)/Ni(3μm)film (length is 20 mm) was 280 μm under low DC magnetic field of 500 Oe and exhibits little hysteresis. These magnetostrictive properties are maintained under low alternating magnetic field. Moreover, the displacement of the film at the resonance frequency exhibits a peak and reached to 1.4 mm. The bimorph-type magnetostrictive thin film is useful for application in micro device as micro-pomp.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Number of pages6
Publication statusPublished - 2006
Externally publishedYes
Event2005 Materials Research Society Fall Meeting - Boston, MA, United States
Duration: 2005 Nov 282005 Dec 1

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2005 Materials Research Society Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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