Bimetallic thermal radiation microsensor with integrated dipole antenna

Yongfang Li; Takahito Ono; Masayoshi Esashi

doi:10.1109/SENSOR.2007.4300539

Bimetallic thermal radiation microsensor with integrated dipole antenna

Yongfang Li, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this paper, a bimetallic thermal radiation microsensor with a dipole antenna for detecting electromagnetic waves ranging from infrared to terahertz region is designed, fabricated and evaluated. A cantilevered silicon-aluminum bimetal structure with an absorber at the end is employed as a thermal sensing element. On the basis of the resonant frequency change of the cantilever relying on photothermal conversion, the incident electromagnetic waves can be detected. The dipole antenna is integrated to enhance the electric field intensity at the sensing element and increase the sensitivity of the microsensor. This electric field enhancement effect is simulated by finite difference time domain simulation and it is found that the designed antenna can enhance the electric field several ten times. The frequency variation sensitivity to an incident light is found to be 11 Hz/μW. Also, a thermal nose equivalent power of 2×10^-10 W/√Hz is demonstrated.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1939-1942
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300539
Publication status	Published - 2007 Dec 1
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 2007 Jun 10 → 2007 Jun 14

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country	France
City	Lyon
Period	07/6/10 → 07/6/14

Keywords

Dipole antenna
FDTD simulation
Resonant thermal radiation sensor
Terahertz wave

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2007.4300539

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Cite this

Li, Y., Ono, T., & Esashi, M. (2007). Bimetallic thermal radiation microsensor with integrated dipole antenna. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1939-1942). [4300539] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300539

Bimetallic thermal radiation microsensor with integrated dipole antenna. / Li, Yongfang; Ono, Takahito; Esashi, Masayoshi.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1939-1942 4300539 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Li, Y, Ono, T & Esashi, M 2007, Bimetallic thermal radiation microsensor with integrated dipole antenna. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300539, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1939-1942, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07/6/10. https://doi.org/10.1109/SENSOR.2007.4300539

Li Y, Ono T, Esashi M. Bimetallic thermal radiation microsensor with integrated dipole antenna. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1939-1942. 4300539. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300539

Li, Yongfang ; Ono, Takahito ; Esashi, Masayoshi. / Bimetallic thermal radiation microsensor with integrated dipole antenna. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 1939-1942 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

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