TY - GEN
T1 - Bimetallic thermal radiation microsensor with integrated dipole antenna
AU - Li, Yongfang
AU - Ono, Takahito
AU - Esashi, Masayoshi
PY - 2007/12/1
Y1 - 2007/12/1
N2 - In this paper, a bimetallic thermal radiation microsensor with a dipole antenna for detecting electromagnetic waves ranging from infrared to terahertz region is designed, fabricated and evaluated. A cantilevered silicon-aluminum bimetal structure with an absorber at the end is employed as a thermal sensing element. On the basis of the resonant frequency change of the cantilever relying on photothermal conversion, the incident electromagnetic waves can be detected. The dipole antenna is integrated to enhance the electric field intensity at the sensing element and increase the sensitivity of the microsensor. This electric field enhancement effect is simulated by finite difference time domain simulation and it is found that the designed antenna can enhance the electric field several ten times. The frequency variation sensitivity to an incident light is found to be 11 Hz/μW. Also, a thermal nose equivalent power of 2×10-10 W/√Hz is demonstrated.
AB - In this paper, a bimetallic thermal radiation microsensor with a dipole antenna for detecting electromagnetic waves ranging from infrared to terahertz region is designed, fabricated and evaluated. A cantilevered silicon-aluminum bimetal structure with an absorber at the end is employed as a thermal sensing element. On the basis of the resonant frequency change of the cantilever relying on photothermal conversion, the incident electromagnetic waves can be detected. The dipole antenna is integrated to enhance the electric field intensity at the sensing element and increase the sensitivity of the microsensor. This electric field enhancement effect is simulated by finite difference time domain simulation and it is found that the designed antenna can enhance the electric field several ten times. The frequency variation sensitivity to an incident light is found to be 11 Hz/μW. Also, a thermal nose equivalent power of 2×10-10 W/√Hz is demonstrated.
KW - Dipole antenna
KW - FDTD simulation
KW - Resonant thermal radiation sensor
KW - Terahertz wave
UR - http://www.scopus.com/inward/record.url?scp=50049123836&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50049123836&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2007.4300539
DO - 10.1109/SENSOR.2007.4300539
M3 - Conference contribution
AN - SCOPUS:50049123836
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1939
EP - 1942
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -