Bimetallic thermal radiation microsensor with integrated dipole antenna

Yongfang Li, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a bimetallic thermal radiation microsensor with a dipole antenna for detecting electromagnetic waves ranging from infrared to terahertz region is designed, fabricated and evaluated. A cantilevered silicon-aluminum bimetal structure with an absorber at the end is employed as a thermal sensing element. On the basis of the resonant frequency change of the cantilever relying on photothermal conversion, the incident electromagnetic waves can be detected. The dipole antenna is integrated to enhance the electric field intensity at the sensing element and increase the sensitivity of the microsensor. This electric field enhancement effect is simulated by finite difference time domain simulation and it is found that the designed antenna can enhance the electric field several ten times. The frequency variation sensitivity to an incident light is found to be 11 Hz/μW. Also, a thermal nose equivalent power of 2×10-10 W/√Hz is demonstrated.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1939-1942
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Dipole antenna
  • FDTD simulation
  • Resonant thermal radiation sensor
  • Terahertz wave

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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