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Bilayer-by-bilayer etching of 6H-GaN(0 0 0 1) with Cl
S. Kuwano, Q. Z. Xue, Y. Asano, Y. Fujikawa, Q. K. Xue, Koji Nakayama, T. Nagao, T. Sakurai
Research output: Contribution to journal › Article › peer-review
7
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(Scopus)