Bi-directionally driven metal cantilevers developed for optical actuation

H. Kwon, M. Nakada, Y. Hirabayashi, Akio Higo, M. Ataka, H. Fujita, H. Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Abstract

    In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.

    Original languageEnglish
    Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
    Pages49-50
    Number of pages2
    DOIs
    Publication statusPublished - 2007 Dec 1
    Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
    Duration: 2007 Aug 122007 Aug 16

    Publication series

    Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

    Other

    Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
    CountryTaiwan, Province of China
    CityHualien
    Period07/8/1207/8/16

    ASJC Scopus subject areas

    • Control and Systems Engineering
    • Electrical and Electronic Engineering

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  • Cite this

    Kwon, H., Nakada, M., Hirabayashi, Y., Higo, A., Ataka, M., Fujita, H., & Toshiyoshi, H. (2007). Bi-directionally driven metal cantilevers developed for optical actuation. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 49-50). [4373834] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373834