Abstract
In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.
| Original language | English |
|---|---|
| Title of host publication | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS |
| Pages | 49-50 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 2007 Dec 1 |
| Event | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China Duration: 2007 Aug 12 → 2007 Aug 16 |
Publication series
| Name | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS |
|---|
Other
| Other | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS |
|---|---|
| Country | Taiwan, Province of China |
| City | Hualien |
| Period | 07/8/12 → 07/8/16 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
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Cite this
Kwon, H., Nakada, M., Hirabayashi, Y., Higo, A., Ataka, M., Fujita, H., & Toshiyoshi, H. (2007). Bi-directionally driven metal cantilevers developed for optical actuation. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 49-50). [4373834] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373834