Bi-directionally driven metal cantilevers developed for optical actuation

H. Kwon; M. Nakada; Y. Hirabayashi; A. Higo; M. Ataka; H. Fujita; H. Toshiyoshi

doi:10.1109/OMEMS.2007.4373834

Bi-directionally driven metal cantilevers developed for optical actuation

H. Kwon, M. Nakada, Y. Hirabayashi, A. Higo, M. Ataka, H. Fujita, H. Toshiyoshi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.

Original language	English
Title of host publication	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages	49-50
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2007.4373834
Publication status	Published - 2007
Event	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China Duration: 2007 Aug 12 → 2007 Aug 16

Publication series

Name	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Country	Taiwan, Province of China
City	Hualien
Period	07/8/12 → 07/8/16

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/OMEMS.2007.4373834

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Kwon, H., Nakada, M., Hirabayashi, Y., Higo, A., Ataka, M., Fujita, H., & Toshiyoshi, H. (2007). Bi-directionally driven metal cantilevers developed for optical actuation. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 49-50). [4373834] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373834

Bi-directionally driven metal cantilevers developed for optical actuation. / Kwon, H.; Nakada, M.; Hirabayashi, Y.; Higo, A.; Ataka, M.; Fujita, H.; Toshiyoshi, H.

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 49-50 4373834 (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kwon, H, Nakada, M, Hirabayashi, Y, Higo, A, Ataka, M, Fujita, H & Toshiyoshi, H 2007, Bi-directionally driven metal cantilevers developed for optical actuation. in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS., 4373834, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp. 49-50, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, Hualien, Taiwan, Province of China, 07/8/12. https://doi.org/10.1109/OMEMS.2007.4373834

Kwon H, Nakada M, Hirabayashi Y, Higo A, Ataka M, Fujita H et al. Bi-directionally driven metal cantilevers developed for optical actuation. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 49-50. 4373834. (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373834

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title = "Bi-directionally driven metal cantilevers developed for optical actuation",

abstract = "In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.",

author = "H. Kwon and M. Nakada and Y. Hirabayashi and A. Higo and M. Ataka and H. Fujita and H. Toshiyoshi",

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AB - In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.

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Bi-directionally driven metal cantilevers developed for optical actuation

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