TY - GEN
T1 - Bi-directionally driven metal cantilevers developed for optical actuation
AU - Kwon, H.
AU - Nakada, M.
AU - Hirabayashi, Y.
AU - Higo, A.
AU - Ataka, M.
AU - Fujita, H.
AU - Toshiyoshi, H.
PY - 2007
Y1 - 2007
N2 - In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.
AB - In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.
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U2 - 10.1109/OMEMS.2007.4373834
DO - 10.1109/OMEMS.2007.4373834
M3 - Conference contribution
AN - SCOPUS:48049096799
SN - 1424406412
SN - 9781424406418
T3 - 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
SP - 49
EP - 50
BT - 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
T2 - 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Y2 - 12 August 2007 through 16 August 2007
ER -