Behavior of the continuous X-ray background in grazing-exit electron probe X-ray microanalysis

K. Tsuji, Z. Spolnik, K. Wagatsuma

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The energy distribution of the background radiation originating from two kinds of substrate materials has been studied using Electron Probe X-Ray Microanalysis (EPMA) at grazing-exit angles. The different behavior between tendencies of background reduction for the silicon and the gold substrates at the grazing exit angle is explained using a critical energy concept. It is also shown experimentally that a gold substrate results in a lower background intensity than a silicon substrate in the energy region 5-7 keV, while on the other hand, for elements with X-ray lines of 2-3 keV, it is advantageous to perform the analysis when such elements are deposited on the silicon substrate.

Original languageEnglish
Pages (from-to)2497-2504
Number of pages8
JournalSpectrochimica Acta - Part B Atomic Spectroscopy
Volume56
Issue number12
DOIs
Publication statusPublished - 2001 Dec 10

Keywords

  • Critical energy
  • Grazing-exit EPMA
  • Si and Au substrates
  • X-Ray background behaviour

ASJC Scopus subject areas

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Spectroscopy

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