Behavior of hydride species on Si surface during methane plasma irradiation investigated by in-situ infrared spectroscopy

Masanori Shinohara, Takayuki Kuwano, Yasuo Kimura, Michio Niwano

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

Abstract

We have investigated the behavior of silicon- and carbon-hydride species on the hydrogen-terminated Si(100) surface, during exposure to hydrogen-diluted methane plasma at room temperature, using infrared absorption spectroscopy (IRAS) in the multiple internal reflection (MIR) geometry. We have measured IRAS spectra in the Si-H and C-H stretching vibration regions of the Si surface that was irradiated by hydrogen-diluted methane plasma. IRAS data demonstrated that at the initial stage of methane plasma exposure, atomic hydrogen and CH3 radicals stick on the H-terminated surface to increasingly generate C-substituted hydride species, and eventually one monolayer of C-containing hydride species is formed. At this stage of plasma exposure, atomic hydrogen and CH3 radicals attack the Si surfaces to create the so-called SiHn complex at sub-surface regions. A prolonged exposure to methane plasma induced an additional deposition of CHx species onto the monolayer of C-containing hydride species.

Original languageEnglish
Pages (from-to)13-18
Number of pages6
JournalThin Solid Films
Volume435
Issue number1-2
DOIs
Publication statusPublished - 2003 Jul 1
Externally publishedYes
EventProccedings of the Joint International Plasma Symposium - Jeju Island, Korea, Republic of
Duration: 2002 Jul 12002 Jul 4

Keywords

  • Hydride species
  • Infrared absorption
  • Methane plasma
  • Si surface

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Behavior of hydride species on Si surface during methane plasma irradiation investigated by in-situ infrared spectroscopy'. Together they form a unique fingerprint.

Cite this