Abstract
We have demonstrated synthesis of BaTi(Hf0.5Zr0.5)O3 (BTHZ) thin films using the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser, for the first time. The BTHZ thin films with a preferred orientation in the c-axis are successfully synthesized and can be carried out under an oxygen gas pressure of 3 Pa at 800°C. Crystallinity of the deposited films seems to depend on the distance between atoms of each element.
Original language | English |
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Pages (from-to) | S1372-S1374 |
Journal | Journal of the Korean Physical Society |
Volume | 32 |
Issue number | 4 SUPPL. |
Publication status | Published - 1998 Dec 1 |
ASJC Scopus subject areas
- Physics and Astronomy(all)