We have demonstrated synthesis of BaTi(Hf0.5Zr0.5)O3 (BTHZ) thin films using the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser, for the first time. The BTHZ thin films with a preferred orientation in the c-axis are successfully synthesized and can be carried out under an oxygen gas pressure of 3 Pa at 800°C. Crystallinity of the deposited films seems to depend on the distance between atoms of each element.
|Journal||Journal of the Korean Physical Society|
|Issue number||4 SUPPL.|
|Publication status||Published - 1998 Dec 1|
ASJC Scopus subject areas
- Physics and Astronomy(all)