Ba2TiO4 and Ba4Ti13O 30 thick films prepared by laser chemical vapor deposition and their microstructure

Dongyun Guo, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ba2TiO4 and Ba4Ti13O 30 thick films were prepared by laser chemical vapor deposition using Ba- and Ti-dipivaloylmethanate precursors. Single-phase Ba2TiO 4 thick films were obtained at 845-946 K and Ba/Ti source molar ratio 2.4. Single-phase Ba4Ti13O30 films were obtained at 944-1011 K and Ba/Ti source molar ratio 0.38. Ba2TiO 4 thick films consisted of truncated grains, while Ba 4Ti13O30 thick films had shellfish-like grains. Ba2TiO4 and Ba4Ti13O30 thick films showed a columnar growth and their deposition rates were 72 and 132 μm h-1, respectively.

Original languageEnglish
Title of host publicationMaterials Integration
PublisherTrans Tech Publications Ltd
Pages199-202
Number of pages4
ISBN (Print)9783037853764
DOIs
Publication statusPublished - 2012
EventInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
Duration: 2011 Dec 12011 Dec 2

Publication series

NameKey Engineering Materials
Volume508
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
CountryJapan
CitySendai
Period11/12/111/12/2

Keywords

  • Laser CVD
  • Thick film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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