Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining

Kazuhiro Hane; Minoru Sasaki; Jonghyeong Song; Yohei Taguchi; Kosuke Miura

Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining

Kazuhiro Hane, Minoru Sasaki, Jonghyeong Song, Yohei Taguchi, Kosuke Miura

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

Abstract

Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.

Original language	English
Pages (from-to)	1785-1791
Number of pages	7
Journal	IEICE Transactions on Electronics
Volume	E84-C
Issue number	12
Publication status	Published - 2001

Keywords

Micro-electromechanical systems
Micromachining
Optical communication system
Optical fiber components
Tunable optical devices

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

@article{e64425a996b34ac186b3139dcf73c4e7,

title = "Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining",

abstract = "Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.",

keywords = "Micro-electromechanical systems, Micromachining, Optical communication system, Optical fiber components, Tunable optical devices",

author = "Kazuhiro Hane and Minoru Sasaki and Jonghyeong Song and Yohei Taguchi and Kosuke Miura",

year = "2001",

language = "English",

volume = "E84-C",

pages = "1785--1791",

journal = "IEICE Transactions on Electronics",

issn = "0916-8524",

publisher = "Maruzen Co., Ltd/Maruzen Kabushikikaisha",

number = "12",

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TY - JOUR

T1 - Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining

AU - Hane, Kazuhiro

AU - Sasaki, Minoru

AU - Song, Jonghyeong

AU - Taguchi, Yohei

AU - Miura, Kosuke

PY - 2001

Y1 - 2001

N2 - Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.

AB - Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.

KW - Micro-electromechanical systems

KW - Micromachining

KW - Optical communication system

KW - Optical fiber components

KW - Tunable optical devices

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M3 - Article

AN - SCOPUS:33747209643

SN - 0916-8524

VL - E84-C

SP - 1785

EP - 1791

JO - IEICE Transactions on Electronics

JF - IEICE Transactions on Electronics

IS - 12

ER -

Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining

Abstract

Keywords

ASJC Scopus subject areas

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