Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining

Kazuhiro Hane, Minoru Sasaki, Jonghyeong Song, Yohei Taguchi, Kosuke Miura

Research output: Contribution to journalArticle

Abstract

Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.

Original languageEnglish
Pages (from-to)1785-1791
Number of pages7
JournalIEICE Transactions on Electronics
VolumeE84-C
Issue number12
Publication statusPublished - 2001 Jan 1

Keywords

  • Micro-electromechanical systems
  • Micromachining
  • Optical communication system
  • Optical fiber components
  • Tunable optical devices

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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