Basic Properties of an LC Filter Using a Thin-Film Inductor

M. Yamaguchi, K. Ishihara, K. I. Arai

Research output: Contribution to journalArticlepeer-review

Abstract

This paper discusses the application of thin-film inductors to thin-film-based LC filters. We fabricated a monolithic thin-film LC filter by using rf sputtering and dry etching techniques. The filter consists of thin-film inductors and thin-film capacitors fabricated on a common substrate. This filter was designed as a second-order low-pass filter having Chebyshev characteristics, with a cutoff frequency of 50 MHz. We developed a technique for measuring this two-port device at high frequencies, and then measured the frequency characteristics. Here we discuss the merits of thin-film LC filters using soft magnetic thin films.

Original languageEnglish
Pages (from-to)179-184
Number of pages6
JournalIEEE Translation Journal on Magnetics in Japan
Volume9
Issue number2
DOIs
Publication statusPublished - 1994

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Engineering(all)

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