Basic Properties of an LC Filter Using a Thin-Film Inductor

M. Yamaguchi; K. Ishihara; K. I. Arai

doi:10.1109/TJMJ.1994.4565845

Basic Properties of an LC Filter Using a Thin-Film Inductor

M. Yamaguchi, K. Ishihara, K. I. Arai

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper discusses the application of thin-film inductors to thin-film-based LC filters. We fabricated a monolithic thin-film LC filter by using rf sputtering and dry etching techniques. The filter consists of thin-film inductors and thin-film capacitors fabricated on a common substrate. This filter was designed as a second-order low-pass filter having Chebyshev characteristics, with a cutoff frequency of 50 MHz. We developed a technique for measuring this two-port device at high frequencies, and then measured the frequency characteristics. Here we discuss the merits of thin-film LC filters using soft magnetic thin films.

Original language	English
Pages (from-to)	179-184
Number of pages	6
Journal	IEEE Translation Journal on Magnetics in Japan
Volume	9
Issue number	2
DOIs	https://doi.org/10.1109/TJMJ.1994.4565845
Publication status	Published - 1994

ASJC Scopus subject areas

Engineering (miscellaneous)
Engineering(all)

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10.1109/TJMJ.1994.4565845

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abstract = "This paper discusses the application of thin-film inductors to thin-film-based LC filters. We fabricated a monolithic thin-film LC filter by using rf sputtering and dry etching techniques. The filter consists of thin-film inductors and thin-film capacitors fabricated on a common substrate. This filter was designed as a second-order low-pass filter having Chebyshev characteristics, with a cutoff frequency of 50 MHz. We developed a technique for measuring this two-port device at high frequencies, and then measured the frequency characteristics. Here we discuss the merits of thin-film LC filters using soft magnetic thin films.",

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AU - Yamaguchi, M.

AU - Ishihara, K.

AU - Arai, K. I.

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Y1 - 1994

N2 - This paper discusses the application of thin-film inductors to thin-film-based LC filters. We fabricated a monolithic thin-film LC filter by using rf sputtering and dry etching techniques. The filter consists of thin-film inductors and thin-film capacitors fabricated on a common substrate. This filter was designed as a second-order low-pass filter having Chebyshev characteristics, with a cutoff frequency of 50 MHz. We developed a technique for measuring this two-port device at high frequencies, and then measured the frequency characteristics. Here we discuss the merits of thin-film LC filters using soft magnetic thin films.

AB - This paper discusses the application of thin-film inductors to thin-film-based LC filters. We fabricated a monolithic thin-film LC filter by using rf sputtering and dry etching techniques. The filter consists of thin-film inductors and thin-film capacitors fabricated on a common substrate. This filter was designed as a second-order low-pass filter having Chebyshev characteristics, with a cutoff frequency of 50 MHz. We developed a technique for measuring this two-port device at high frequencies, and then measured the frequency characteristics. Here we discuss the merits of thin-film LC filters using soft magnetic thin films.

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JO - IEEE translation journal on magnetics in Japan

JF - IEEE translation journal on magnetics in Japan

SN - 0882-4959

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ER -

Basic Properties of an LC Filter Using a Thin-Film Inductor

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