Basic characteristics of displacement-amplified dynamic varifocal mirror using mechanical resonance

Takashi Sasaki, Daiki Sato, Kenta Nakazawa, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

We have evaluated basic characteristics of a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from silicon-on-insulator wafer and glass plate. The estimated displacement amplification of varifocal mirror was approximately 150 by using the mechanical resonance at pressure of 2 Pa. In the displacement amplified state, the beam focusing was confirmed. The confocal measurement was successfully demonstrated using the displacement-amplified dynamic varifocal mirror.

Original languageEnglish
Pages (from-to)253-257
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume134
Issue number8
DOIs
Publication statusPublished - 2014 Jan 1

Keywords

  • Confocal microscope
  • Displacement-amplification
  • Micro-mirror
  • Resonance
  • Varifocal mirror

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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