We have evaluated basic characteristics of a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from silicon-on-insulator wafer and glass plate. The estimated displacement amplification of varifocal mirror was approximately 150 by using the mechanical resonance at pressure of 2 Pa. In the displacement amplified state, the beam focusing was confirmed. The confocal measurement was successfully demonstrated using the displacement-amplified dynamic varifocal mirror.
- Confocal microscope
- Varifocal mirror
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering