@inproceedings{4a58c57696f94ee5bfcbb8324edc4db9,
title = "Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer",
abstract = "A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.",
keywords = "BaSrTiO, LiTaO, tunable filter",
author = "Tetsuya Kimura and Hideaki Kobayashi and Yutaka Kishimoto and Hideyuki Kato and Masahiro Inaba and Hashimoto, {Ken Ya} and Takeshi Matsumura and Hideki Hirano and Michio Kadota and Masayoshi Esashi and Shuji Tanaka",
year = "2014",
month = oct,
day = "20",
doi = "10.1109/ULTSYM.2014.0195",
language = "English",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
pages = "795--798",
booktitle = "IEEE International Ultrasonics Symposium, IUS",
note = "2014 IEEE International Ultrasonics Symposium, IUS 2014 ; Conference date: 03-09-2014 Through 06-09-2014",
}