Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer

Tetsuya Kimura; Hideaki Kobayashi; Yutaka Kishimoto; Hideyuki Kato; Masahiro Inaba; Ken Ya Hashimoto; Takeshi Matsumura; Hideki Hirano; Michio Kadota; Masayoshi Esashi; Shuji Tanaka

doi:10.1109/ULTSYM.2014.0195

Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO₃ varactors directly fabricated on a LiTaO₃ wafer

Tetsuya Kimura, Hideaki Kobayashi, Yutaka Kishimoto, Hideyuki Kato, Masahiro Inaba, Ken Ya Hashimoto, Takeshi Matsumura, Hideki Hirano, Michio Kadota, Masayoshi Esashi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Citations (Scopus)

Abstract

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO₃ wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO₃ substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

Original language	English
Title of host publication	IEEE International Ultrasonics Symposium, IUS
Publisher	IEEE Computer Society
Pages	795-798
Number of pages	4
ISBN (Electronic)	9781479970490
DOIs	https://doi.org/10.1109/ULTSYM.2014.0195
Publication status	Published - 2014 Oct 20
Event	2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States Duration: 2014 Sep 3 → 2014 Sep 6

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2014 IEEE International Ultrasonics Symposium, IUS 2014
Country	United States
City	Chicago
Period	14/9/3 → 14/9/6

Keywords

BaSrTiO
LiTaO
tunable filter

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2014.0195

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Kimura, T., Kobayashi, H., Kishimoto, Y., Kato, H., Inaba, M., Hashimoto, K. Y., Matsumura, T., Hirano, H., Kadota, M., Esashi, M., & Tanaka, S. (2014). Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO₃ varactors directly fabricated on a LiTaO₃ wafer. In IEEE International Ultrasonics Symposium, IUS (pp. 795-798). [6931763] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2014.0195

Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO₃ varactors directly fabricated on a LiTaO₃ wafer. / Kimura, Tetsuya; Kobayashi, Hideaki; Kishimoto, Yutaka; Kato, Hideyuki; Inaba, Masahiro; Hashimoto, Ken Ya; Matsumura, Takeshi; Hirano, Hideki; Kadota, Michio; Esashi, Masayoshi; Tanaka, Shuji.

IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, 2014. p. 795-798 6931763 (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kimura, T, Kobayashi, H, Kishimoto, Y, Kato, H, Inaba, M, Hashimoto, KY, Matsumura, T, Hirano, H, Kadota, M, Esashi, M & Tanaka, S 2014, Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO₃ varactors directly fabricated on a LiTaO₃ wafer. in IEEE International Ultrasonics Symposium, IUS., 6931763, IEEE International Ultrasonics Symposium, IUS, IEEE Computer Society, pp. 795-798, 2014 IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 14/9/3. https://doi.org/10.1109/ULTSYM.2014.0195

Kimura T, Kobayashi H, Kishimoto Y, Kato H, Inaba M, Hashimoto KY et al. Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO₃ varactors directly fabricated on a LiTaO₃ wafer. In IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society. 2014. p. 795-798. 6931763. (IEEE International Ultrasonics Symposium, IUS). https://doi.org/10.1109/ULTSYM.2014.0195

Kimura, Tetsuya ; Kobayashi, Hideaki ; Kishimoto, Yutaka ; Kato, Hideyuki ; Inaba, Masahiro ; Hashimoto, Ken Ya ; Matsumura, Takeshi ; Hirano, Hideki ; Kadota, Michio ; Esashi, Masayoshi ; Tanaka, Shuji. / Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO₃ varactors directly fabricated on a LiTaO₃ wafer. IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, 2014. pp. 795-798 (IEEE International Ultrasonics Symposium, IUS).

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abstract = "A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.",

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AU - Inaba, Masahiro

AU - Hashimoto, Ken Ya

AU - Matsumura, Takeshi

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AB - A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

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