Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer

Tetsuya Kimura, Hideaki Kobayashi, Yutaka Kishimoto, Hideyuki Kato, Masahiro Inaba, Ken Ya Hashimoto, Takeshi Matsumura, Hideki Hirano, Michio Kadota, Masayoshi Esashi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages795-798
Number of pages4
ISBN (Electronic)9781479970490
DOIs
Publication statusPublished - 2014 Oct 20
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 2014 Sep 32014 Sep 6

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period14/9/314/9/6

Keywords

  • BaSrTiO
  • LiTaO
  • tunable filter

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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