Ball surface acoustic wave hydrogen sensor with widest sensing range and fast response

K. Yamanaka, T. Abe, N. Iwata, T. Tsuji, T. Mihara, S. Akao, K. Noguchi, N. Nakaso, D. Sim, N. Takeda, Y. Ebi, T. Fukiura, H. Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

SAW(surface acoustic wave) excited on a spherical surface under a specific condition is naturally collimated, realizing ultra-multiple roundtrips along an equator of the sphere. The ball SAW hydrogen gas sensor is based on this newly discovered phenomenon, and uses a very thin Pd-Ni alloy sensitive film. The detection range for hydrogen gas was 10 ppm to 100 % and the response time was less than 1s for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector (DQD).

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2549-2552
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Ball SAW sensor
  • DQD
  • Hydrogen gas sensor

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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