Ball SAW device for hydrogen gas sensor

Kazushi Yamanaka; Satoru Ishikawa; Noritaka Nakaso; Nobuo Takeda; Tsuyoshi Mihara; Yusuke Tsukahara

Ball SAW device for hydrogen gas sensor

Kazushi Yamanaka, Satoru Ishikawa, Noritaka Nakaso, Nobuo Takeda, Tsuyoshi Mihara, Yusuke Tsukahara

Research output: Contribution to journal › Conference article

Abstract

We propose a novel gas sensor using surface acoustic waves (SAW) on a sphere, with a typical velocity change of 10 ppm, and sensitivity of 10 ppb. In the first implementation for hydrogen sensor, a long propagation path of 1.3 m at 41th turns of 45 MHz SAW around a 10-mm- φ quartz ball realized the propagation time as long as 403 μ s. Consequently, a sampling period of 25 ps realized relative temporal resolution of 0.06 ppm. By virtue of this high resolution, when sensing film was as thin as 20 nm, 7 ppm velocity change when exposed to 3 % hydrogen in Ar gas was precisely measured. The response time was 60s, shortest among reported SAW hydrogen sensors, due to the small Pd film thickness. We also found a SAW attenuation increase which may be used to enhance the gas selectivity.

Original language	English
Pages (from-to)	299-302
Number of pages	4
Journal	Proceedings of the IEEE Ultrasonics Symposium
Volume	1
Publication status	Published - 2003 Dec 1
Event	2003 IEEE Ultrasonics Symposium - Proceedings - Honolulu, HI, United States Duration: 2003 Oct 5 → 2003 Oct 8

ASJC Scopus subject areas

Acoustics and Ultrasonics

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Yamanaka, K., Ishikawa, S., Nakaso, N., Takeda, N., Mihara, T., & Tsukahara, Y. (2003). Ball SAW device for hydrogen gas sensor. Proceedings of the IEEE Ultrasonics Symposium, 1, 299-302.

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abstract = "We propose a novel gas sensor using surface acoustic waves (SAW) on a sphere, with a typical velocity change of 10 ppm, and sensitivity of 10 ppb. In the first implementation for hydrogen sensor, a long propagation path of 1.3 m at 41th turns of 45 MHz SAW around a 10-mm- φ quartz ball realized the propagation time as long as 403 μ s. Consequently, a sampling period of 25 ps realized relative temporal resolution of 0.06 ppm. By virtue of this high resolution, when sensing film was as thin as 20 nm, 7 ppm velocity change when exposed to 3 % hydrogen in Ar gas was precisely measured. The response time was 60s, shortest among reported SAW hydrogen sensors, due to the small Pd film thickness. We also found a SAW attenuation increase which may be used to enhance the gas selectivity.",

author = "Kazushi Yamanaka and Satoru Ishikawa and Noritaka Nakaso and Nobuo Takeda and Tsuyoshi Mihara and Yusuke Tsukahara",

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journal = "Proceedings - IEEE Ultrasonics Symposium",

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T1 - Ball SAW device for hydrogen gas sensor

AU - Yamanaka, Kazushi

AU - Ishikawa, Satoru

AU - Nakaso, Noritaka

AU - Takeda, Nobuo

AU - Mihara, Tsuyoshi

AU - Tsukahara, Yusuke

PY - 2003/12/1

Y1 - 2003/12/1

N2 - We propose a novel gas sensor using surface acoustic waves (SAW) on a sphere, with a typical velocity change of 10 ppm, and sensitivity of 10 ppb. In the first implementation for hydrogen sensor, a long propagation path of 1.3 m at 41th turns of 45 MHz SAW around a 10-mm- φ quartz ball realized the propagation time as long as 403 μ s. Consequently, a sampling period of 25 ps realized relative temporal resolution of 0.06 ppm. By virtue of this high resolution, when sensing film was as thin as 20 nm, 7 ppm velocity change when exposed to 3 % hydrogen in Ar gas was precisely measured. The response time was 60s, shortest among reported SAW hydrogen sensors, due to the small Pd film thickness. We also found a SAW attenuation increase which may be used to enhance the gas selectivity.

AB - We propose a novel gas sensor using surface acoustic waves (SAW) on a sphere, with a typical velocity change of 10 ppm, and sensitivity of 10 ppb. In the first implementation for hydrogen sensor, a long propagation path of 1.3 m at 41th turns of 45 MHz SAW around a 10-mm- φ quartz ball realized the propagation time as long as 403 μ s. Consequently, a sampling period of 25 ps realized relative temporal resolution of 0.06 ppm. By virtue of this high resolution, when sensing film was as thin as 20 nm, 7 ppm velocity change when exposed to 3 % hydrogen in Ar gas was precisely measured. The response time was 60s, shortest among reported SAW hydrogen sensors, due to the small Pd film thickness. We also found a SAW attenuation increase which may be used to enhance the gas selectivity.

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