Balanced electron drift oxide etcher with Xe added gas chemistry for low cost and high performance contact metallization

Hiroyuki Komeda, Masaki Hirayama, Yusuke Hirayama, Kazuhide Ino, Ryu Kaihara, Tadahiro Ohmi

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science