Background gas analysis with leaky attenuation in a trace moisture analyzer using a ball surface acoustic wave sensor

Kazushi Yamanaka, Shingo Akao, Nobuo Takeda, Toshihiro Tsuji, Toru Oizumi, Hideyuki Fukushi, Tatsuhiro Okano, Yusuke Tsukahara

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A method is described for background gas (BG) analysis in surface acoustic wave (SAW) gas sensors using two frequencies. The gas parameter G is defined as the square root of molecular weight times the ratio of specific heat at constant pressure to specific heat at constant volume, which is a representative property of BGs. In an experiment using varying BGs, the measured G values agreed with the true values. The concentrations of mixed BGs were successfully measured. This method will be useful in a trace moisture analyzer in natural gases and in the optimization of the purge process of glove boxes.

Original languageEnglish
Article numberSGGB04
JournalJapanese journal of applied physics
Volume58
Issue numberSG
DOIs
Publication statusPublished - 2019

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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